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Film thickness distribution measuring instrument - List of Manufacturers, Suppliers, Companies and Products

Film thickness distribution measuring instrument Product List

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Introduction to the inline film thickness distribution measurement device "FiDiCa".

Introduction to the inline film thickness distribution measurement device "FiDiCa".

This is an introduction to the world's first inline film thickness distribution measurement device that measures interference light using a thin film with an imaging spectrometer.

The imaging spectroscopic camera (hyperspectral camera) spectrally analyzes the reflected light from a linear area and outputs it as a two-dimensional image. By connecting it to a monochrome camera, spectral data from many points can be collected simultaneously.

  • Image Processing Equipment
  • Other measurement, recording and measuring instruments
  • Other inspection equipment and devices

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Full Face Comprehensive Mask Thickness Distribution Measurement Device

Full Face Comprehensive Mask Thickness Distribution Measurement Device

Film thickness measurement goes from "point" to "surface." High-speed full-area film thickness measurement device.

The Full Face device for measuring the thickness distribution of films is a system that rapidly measures the film thickness uniformly across the entire surface of wafers or glass substrates. Its advantage lies in the ability to detect film thickness anomalies that might be overlooked in point measurements. Using a line spectroscopic camera, it measures the interference light from the film pixel by pixel along the line width. By performing a line scan across the entire diameter of the wafer, it can calculate the film thickness for each position pixel without gaps. It can measure up to 4 million points of film thickness in a short time and is capable of multilayer film analysis. There is a Dual model for both full and local measurements, and there are three camera lineups depending on the thickness of the film.

  • Coating thickness gauge

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